EHS Evaluation of Germanium Tetrafluoride and Decaborane as Ion Implant Source Materials
Nicholas Filipp, PhD, C.I.H., - Environmental and Occupational Risk Management, Ronald T. Emerich, C.I.H. - Environmental and Occupational Risk Management , Steven Roberge - Axcelis Technologies, Inc. (SESHA Journal Volume 15 Number 3/4 pp. 22 - 31 )

Interest in germanium tetrafluoride and decaborane as ion implant source materials is increasing. Both of these materials are considered to be extremely toxic; however, applicable toxicological literature is limited. EHS evaluation of these materials is complicated by the lack of direct sampling techniques and the potential complex chemical reactions taking place in the ion source. This paper will focus on methods of evaluating the EHS considerations in handling the materials and operating and maintaining the equipment. Recommended safety precautions and exposure monitoring techniques will be included.