Using a Modified HazOP/FMEA Methodology for Managing Process Risk
Steven R. Trammell and Brett J. Davis - Motorola, Semiconductor Products Sector (SESHA Journal Volume 15 Number 3/4 pp. 32 - 39 )

As semiconductor manufacturing processes have become more complex and potentially hazardous, risk management of the costs of process outages and of impacts to human health and the environment has become increasingly important. Combined with operational risk reduction activities, such as preventive and predictive maintenance, real time system status monitoring, and periodic process inspections, design phase process risk assessments are an effective tool for risk management. This paper will present a process risk assessment approach, based on strength of both Hazard and Operability Study (HazOp) and Failure Mode and Effects Analysis (FMEA) methodologies, which has served will in this application.