Unique Industrial Hygiene Concerns in Gallium-Arsenide (GaAs) Device Manufacturing Facilities
Anthony Jones - Motorola (SESHA Journal Volume 15 Number 3/4 pp. 40 - 48 )

Gallium-Arsenide (GaAs) device manufacturing introduces a variety of unique industrial hygiene concerns that may not be present or of significant concern in silicon-based manufacturing operations. This paper describes and evaluates several examples illustrating this challenge and provides a working platform for effective industrial hygiene management in a GaAs device manufacturing facility.