the Threat of Ignition and Fire in Plastic Wet Process Equipment
Richard L. Koski, SCP Global Technologies (SSA Journal Volume 10 Number 4 - Winter 1996 pp. 35 - 38 )
The potential for fire in semiconductor fabricating facilities has been an area of significant concern for many years. As device sizes have moved to smaller geometries and the associated cost of factories has increased, the attention to this issue has become more acute. In 1995, SCP Global Technologies (formerly Santa Clara Plastics) completed a study with Factory Mutual Research Corporation (FMRC) to better understand the total risk. This report summarizes the areas of concern and the findings of the FMRC report.