Silane Systems for Semiconductor Manufacturing
David A. Quadrini - Texas Insturments, Jose E. Frausto - Texas Insturments (SSA Journal Volume 11 Number 4 - Winter 1997 pp. 15 - 20 )
The safety and economic benefits of bulk silane systems have been realized by the semiconductor industry for some time. However, the perceived hazards associated with dealing in large quantities of silane have discouraged their development. Recent studies are showing that these hazards have been overestimated. This article details the advantages and disadvantages of bulk silane systems, UFC code issues, desing aspects to consider, and redundancy and safety issues. The information is from the perspective of a company that recently has commissioned their second bulk silane system supporting semiconductor manufacturing.