Bulk
Silane Systems for Semiconductor Manufacturing
David A. Quadrini - Texas
Insturments, Jose E. Frausto - Texas Insturments
(SSA Journal Volume 11 Number 4 -
Winter 1997 pp. 15 - 20
)
The
safety and economic benefits of bulk silane systems have been
realized by the semiconductor industry for some time. However, the
perceived hazards associated with dealing in large quantities of
silane have discouraged their development. Recent studies are showing
that these hazards have been overestimated. This article details the
advantages and disadvantages of bulk silane systems, UFC code issues,
desing aspects to consider, and redundancy and safety issues. The
information is from the perspective of a company that recently has
commissioned their second bulk silane system supporting semiconductor
manufacturing.
