CLF(3) - Why? Why Not?
John C. Shepard (SSA Journal Volume 12 Number 4 - Winter 1998 pp. 17 - 18 )

When new chemicals are introduced into the processes used to manufacture integrated circuits, there are those who advocate using eh chemical because it improves the process and profits. Other people will protest the new chemical on the basis that a new chemical implies unknown effects on the product or factory environment. As safety professionals it is our duty to assess the risks to employees and physical assets posed by the new chemical. We must also prescribe the engineering controls, monitoring, and personal protective equipment needed to protect our employees and physical assets. This paper will present some of the reasons justifying the use of CIF3 and the response to concerns about the use of this chemical.