Trifluoride System Design at Applied Materials Technology Center
C. Alec MacLean - Applied Materials, Inc. (SSA Journal Volume 12 Number 4 - Winter 1998 pp. 35 - 37 )
Applied Materials began researching the use of chlorine trifluoride (CIF3) in 1994. This paper will describe the process used in designing and installing the facilities for the CIF3 system at Applied Materials' Technology Development Center, and some of the decisions that were made about that installation.