Migration Studies In Fabrication Facilities Using Tracer Gas
Melissa O'Brien - ST Microelectronics , P.L. Lagus, Ph.D., CIH - Lagus Applied Technology, Inc. (SSA Journal Volume 13 Number 2 - Summer 1999 pp. 23 - 28 )
Odor migration in fabrication facilities is becoming a recognized problem in the semiconductor industry. Through the use of tracer gas studies to understand exhaust flows and the airflow patterns in newly developed and existing factories, one can investigate the origin and the likely migration patterns that can occur with a fab. Examples from recent testing will be given. Knowledge of these factors allows one to understand the engineering controls that must be put in place to eliminate or greatly reduce the potential for odor migration.