Monitoring Arsine in the Semiconductor Industry
Margaret E. O'Brien - Texas Instruments Incorporated (SSA Journal Volume 14 Number 4 - Winter 2000 pp. 31 - 35 )

The American Conference of Governmental Industrial Hygienists (ACGIH) Proposed to lower the Threshold Limit Value (TLV) - Time Weighted Average (TWA) for arsine (AsH3) in the Notice of Intended Changes - 1999 Threshold Limit Values for Chemical Substances and Physical Agents. The current TLV-TWA for arsine is 50 parts per billion (ppb) and the ACGIH's proposal is to lower the arsine TLV-TWA to 2ppb. In this article, the ACGIH's basis for lowering the arsine TLV-TWA will be addressed, as well as their decision to keep arsine on the Notice of Intended Changes for 2000. If ACGIH lowers the limit as proposed, the limitations of existing arsine monitoring technologies will present a potential operational impact for the semiconductor industry. A survey of gas detection companies regarding the status of monitoring arsine in the single part-per-billion range has been included.