Challenges of Copper Waste Water Treatment in R&D Labs
Huynh, Tom; Gopalakrishna, Varun
(Applied Materials, Santa Clara, CA and EORMŽ Inc., Sunnyvale, CA)
Treatment of copper contaminated wastewater from CMP applications poses significant challenges. There are a host of technologies (ranging from "back-pad" to point-of-use") that have been employed with varying success. The problem is all the more challenging in an R&D environment where process recipes are changing on a daily basis. The presentation will focus on various combination solutions that have been implemented and the level of effectiveness of each.
[abstract as .pdf]