SESHA 2004 Symposium - Abstract

VOC Abatement by Bio Technology

Clegg, Chris
(Philips Semiconductors)

In order to comply with the UKís Integrated Pollution Control Regulations (IPC), there is a requirement that for certain authorised processes, VOC process emissions must not exceed a level of 50mg/m3 . The Philips Semiconductors site, based in Hazel Grove, UK, has had an on going programme of VOC reduction for a number of years based on device technology changes. This has involved substitution of solvents by aqueous alternatives & reduction in solvent use by additional solvent recycling in order to achieve a solvent emission reduction, together with meeting the Corporate Eco-Vision Environmental targets. Unfortunately, these improvements alone have not achieved the required level of emission reduction & an end of pipe treatment solution had to be implemented. Conventional VOC abatement techniques have, in the past, concentrated on absorption onto activated charcoal or by the use of burner systems of one form or another. Whilst some of these solutions, most notably Rotary Thermal Oxidiser systems, perform at high abatement efficiencies, the ongoing energy costs can be high & bio abatement systems can provide an abatement solution with lower running costs. In agreement with the Regulators, Stockport Metropolitan Borough Council & the Environment Agency, an extended trial was undertaken in order to prove that bio abatement would be capable of reducing the VOC emissions to an acceptable level. The trial subsequently proved successful & a full size plant has been built that will deal with the emissions from the two fabs on site. This presentation summarises the project from itís initial feasibility study, through to the final commissioning of the full size plant, including emission data pre & post abatement.

[abstract as .pdf]