SESHA 2004 Symposium - Abstract

Case Study: Review of UC-Berkeley Training Program

Tchong, Maria I.
(University of California Berkeley)

Special hazards exist in a research and development (R&D) semiconductor facility. Although R&D facilities are on a non-production lab scale with limited amounts of hazardous chemicals and hazards, they are still performing procedures found in large production semiconductor industry. In addition, R& D facilities are still subjected to standards and regulations. This paper will summarize the basic processes found in the semiconductor facility, associated hazards, and a case study focusing on UC-Berkeley own R&D facility, otherwise known as the Microfabrication Laboratory (Microlab). The case study will review the current Microlab’s Chemical Hygiene Plan to check for compliance, as well as, make recommendations for improving their training program.

[abstract as .pdf]