SESHA 2005 Symposium - Abstract

Around the World in 80 Days with a New Chemical Substance?

Majors, Mary
(Air Products and Chemicals, Inc., Carlsbad, CA)

The semiconductor industry is known for its rapid pace of technology advancement. As the industry works to keep pace with Moore’s Law, new and novel chemical substances are being evaluated for their utility in enhancing semiconductor performance. International chemical control regulations often apply to these new substances and can significantly impact the speed with which these new substances can be deployed in high volume production manufacturing environments. Because of this, international chemical control regulations must be taken into consideration when planning new process development. An overview of international chemical control regulations in semiconductor manufacturing regions will be provided. Regulations in the US, Europe, Japan, Korea and China will be explored, including estimated timelines and information requirements.

[abstract as .pdf]