SESHA 2005 Symposium - Abstract

Developing a Climate Change Action Plan

Higgs, Tim
(Intel, Chandler, AZ)

In recent years, climate change has become recognized as a critical environmental issue. Companies that wish to establish or maintain their credentials as industry leaders on environmental matters are expected to have programs in place that mitigate their climate change impact. The semiconductor industry took a leadership position on PFCs a decade ago, and is now expanding its programs to include minimizing the climate change impact from energy use as well. This paper will look at the development of an overall company position on climate change, including: Key program elements that need to be included How to develop an overall greenhouse gas inventory Useful technical resources available Steps for mitigating impact, in PFCs, energy use, alternate energy sources The paper will also examine current information detailing where energy is used in the fab, and new developments in improving efficiency and minizing total climate change impact.

[abstract as .pdf]