SESHA 2005 Symposium - Abstract

An Overview of the Semiconductor Manufacturing Process

Benson, Roger
(Factory Mutual Global)

This overview presentation will cover the three basic process steps of: 1) Layering - Oxidation, CVD and PVD; 2) Patterning - Resist and develop application, exposure methods, and etching; 3) Doping - Diffusion and ion implant. We will also look briefly at wafer manufacturing, mask-making and back end processing. The hazards presented by the processes and chemicals used will be briefly discussed to set the stage for more detailed presentations on EHS consideration in the Boot Camp Session.

[abstract as .pdf]