SESHA 2006 Symposium - PDC Description

Semiconductor Industry Exhaust Management, POU Abatement and Centralized Abatement Equipment

Sherer, Mike
(Sherer Consulting Services, Inc. )

The semiconductor industry has numerous challenges in the wafer fab concerning exhaust systems, point-of-use abatement, and centralized abatement equipment. This half-day course will review how to specify types of centralized exhaust systems, specify/operate POU abatement technologies for different processes, and specify/operate centralized abatement equipment (including scrubbers, VOC control equipment and emergency release systems). Numerous examples with solutions will be presented. Information will also be presented on exhaust line management.

[description as .pdf]