Industry Standards: Adding Value to Equipment Safety Design
(Nikon Precision Inc.)
SEMI safety guidelines (often called “standards”) and safety standards from other organizations are a common baseline for Design for ESH among suppliers, and are often used as the conformance reference by end users. This enables efficient use of design resources, and the common reference points reduce the number of customer specific safety documents. Using these standards as evaluation references also provides end users with assurance the equipment is “safe.” Active participation in standards development helps prepare particpants for new issues and changes in best practices, making safety “easier” and more cost effective for all involved. Specific examples are also cited.
[abstract as .pdf]