SESHA 2007 Symposium - Abstract

EHS Concerns with Diffusion Processes

Mulenga, Emmanuel

The diffusion process involves exposure of silicon wafers to high temperature toxic, corrosive, flammable and other hazardous gases within a large quartz tube. Safety issues with diffusion furnaces include industrial hygiene concerns, fire and explosion prevention, thermal hazards as well as ergonomics and environmental considerations. This presentation will discuss how diffusion furnaces work and review each hazard associated with operation and maintenance of diffusion furnaces and provide students with an understanding of control measure for diffusion processing.

[abstract as .pdf]