SESHA 2010 Symposium - Abstract

Exhaust/Energy Strategies For Fabs

Olander, Karl
(ATMI, Danbury, CT)

Historically the use of hazardous production materials, especially highly toxic gases, has presented serious challenges to the semiconductor industry. The ability to abate or dilute chemical releases to concentrations not immediately dangerous to life and health is commonly used to mitigate risk, but comes at an energy cost. Gas cabinet exhaust rates are set to contain expected worst case release events and are governed by SEMI Standards and the International Fire Code. In the last decade technology has been developed that places the emphasis on preventing, rather than containing, hazardous production material releases. Avoiding gas releases altogether sets the stage to significantly reduce energy and operating costs. This paper examines and compares methodologies to reduce energy costs for gas cabinets and tool enclosures.