SESHA 2010 Symposium - Abstract

ISMIís CleanCalc II Fab Energy and Utility Simulator

Beasley, James
(ISMI ESH Technology Center)

The ISMI CleanCalc II Clean Room Energy Simulation tool is a powerful desktop application useful for annual and peak energy for semiconductor facilities based on hourly, world-wide weather data and 46 other variables including size, location, cleanroom temperature and relative humidity, recirculation and makeup air handler flow rates and other operating parameters, humidification method, heat source, chiller efficiency, fan efficiency, boiler efficiency, tool energy, tool heat removal, and heat burden. This presentation will provide an overview and live demonstration of the application.