SESHA 2011 Symposium / SIA IHTESH 2011 --- Abstract

Air Permitting Wafer Fabs

Sherer, Mike
(Sherer Consulting Services, Inc., Gilbert, Arizona)

Semiconductor fabs have complex processes that emit numerous process gases and byproducts. This presentation will provide information on developing calculation methodologies for air permitting, including byproducts. Strategies for air permitting will also be presented.