SESHA 2011 Symposium / SIA IHTESH 2011 --- Abstract

Decontamination and decommissioning of equipment: Roundtable Discssion

Yeakley, Tim
(Texas Instruments)

Semiconductor manufacturing and research facilities regularly ship equipment parts for rebuild or repair. These parts could contain chemical and byproducts residues that cannot be removed on-site without causing irreversible damage to the part. The presence of these residues may also require compliance with various regulations during transport from DOT, IATA, IMDG, etc. The purpose of this roundtable discussion is to share information between semiconductor companies on the best known methods to classify these parts for transportation. We will discuss how to determine whether decontamination of a specific part onsite is appropriate; the de-minimus quantities above which the part will have to be regulated; methods used to determine the hazards of byproducts in parts; necessity of testing the byproducts; whether regulatory tests can be modified for practical application; and methods for managing special cases like batteries and magnets.