SESHA 2011 Symposium

Note: Proceedings articles appears as links below each presentation where available.

Program

Daily Grids:

May 16 (Monday): Professional Development Courses (PDC)
May 17 (Tuesday): Opening Ceremony, General Session Grid
May 18 (Wednesday): General Session Grid
May 19 (Thursday): General Session Grid
May 20 (Friday): Professional Development Courses (PDC)

May 16 (Monday): Professional Development Courses (PDC)

Morning - 8:00 am - 12 Noon

PDC #1: Fundamentals and EHS Challenges of Semiconductor Manufacturing (S. Creighton)
- Full Day -

PCD #2: Vacuum and cryogen safety concerns. (R. Shrouf)
- Half day morning -

Afternoon - 1:00 pm - 5:00 pm

PDC #1: Continues from morning

PCD #3: Silane Safety (E. Ngai)
- Half day afternoon -

6:00 -8:00 pm: PDC #4: Ethics and ESH

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Schedule Grid

May 17 (Tuesday)

08:00 Opening Ceremony and Awards Presentation [Proceedings article (.pdf)] Elizabeth Aton - SSA/SESHA History Project [Proceedings article (.pdf)]
09:30 Break - Vendor exhibiting and networking time
10:00 SIA Regional Updates SIA, ESIA, TSIA, CSIA, KSIA, JSIA Proceedings articles (.pdf): ESIA Update JSIA Update KSIA Update TSIA Update [Proceedings article (.pdf)]
11:00 David Isaacs - SIA Global Semiconductor Industry - Looking Forward [Proceedings article (.pdf)]
12:00 Lunch Break - Exhibit Hall - Vendor exhibiting and networking time
13:45 *Global Chem Regs* Environmental Regulatory Developments in the EU S.Harte [Proceedings article (.pdf)]	13:45 *Safety-IH* Evaluation of Potential Cytotoxicity of Nanoscale Inorganic Oxides Utilized in Semiconductor Manufacturing R.Sierra-Alvarez, L.Otero, C.Garcia, Antonia Luna-Velasco, Angel Cobo, Jim A Field	13:45 *GHG* Compliance Techniques for new Greenhouse Gas Regulations T.Higgs [Proceedings article (.pdf)]
14:30 *Global Chem Regs* JAMP Activity Update S.Ibuka [Proceedings article (.pdf)]	14:30 *Safety-IH* Preventing musculoskeletal discomforts for a healthy workplace R.Lin [Proceedings article (.pdf)]	14:30 *GHG* PFC Stack Emissions Testing S.Inloes [Proceedings article (.pdf)]
15:15 Break - Exhibit Hall - Vendor exhibiting and networking time
15:45 *Global Chem Regs* Decontamination and decommissioning of equipment: Roundtable Discssion T.Yeakley [Proceedings article (.pdf)]	15:45 *Safety-IH* Tetramethylammonium hydroxide (TMAH): Toxicity and Methods to Reduce Risk in the Workplace K.DiZio, R.Melville, E.Timlin [Proceedings article (.pdf)]	15:45 *GHG* Developing a Fluorinated Greenhouse Gas Stack Testing Method Using FTIR T.Gilliland, C.Laush [Proceedings article (.pdf)]
	16:30 *Safety-IH* The Integration of a Toxic Gas Monitoring System into the Building Fire Alarm System J.Sweeney [Proceedings article (.pdf)]	16:30 *GHG* Title: Staying up to date with the EPA’s Mandatory Reporting for Greenhouse Gases and California’s AB32- Regulations as they relate to Semiconductor and Related Devices. J.Cook [Proceedings article (.pdf)]

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May 18 (Wednesday)

08:30 Keynote Presentation: Ic Insights Trevor Yancey [Proceedings article (.pdf)]
09:30 Break - Exhibit Hall - Vendor exhibiting and networking time
10:00 *Safety/IH* Safety and Health Committee x.qiao, x.wang [Proceedings article (.pdf)]	10:00 *CSR* The Business Case for Integrating ESG G.Niekerk, S. Fallender, E.Zeller [Proceedings article (.pdf)]	10:00 *PV / Solar Manufacturing EHS* SF6 Massive-Scale Decomposition Technology and Clean Development Mechanism Project in TFT-LCD Industry, South Korea. J.Choi [Proceedings article (.pdf)]	10:00 *Abatement Strategies* Point -of -Use ammonium compounds removal - keeping exhaust emission clear A.Tsou [Proceedings article (.pdf)]
10:45 *Safety/IH* A Study On Odor Reduction for Semiconductor Industry N.Park, S.Kim, C.Shin [Proceedings article (.pdf)]	10:45 *CSR* Implementation Strategy for Corporate Social Responsibility (CSR) at ON Semiconductor K.Evans, T.McCarley, P.Amorin [Proceedings article (.pdf)]	10:45 *PV / Solar Manufacturing EHS* PV Industry - Overview of EHS Considerations W.Cyrs, K.Krause, A.McIntyre	10:45 *Abatement Strategies* The cooperation to reduce SF6 emission between the electricity and Magnesium industries J.LU [Proceedings article (.pdf)]
11:30 Lunch Break - Exhibit Hall - Vendor exhibiting and networking time
13:00 *Emerging Codes* Air Permitting Wafer Fabs M.Sherer [Proceedings article (.pdf)]	13:00 *Waste Minimization* Recovering Semiconductor Manufacturing Materials R.Parker, B.Atkinson, J.Bradshaw [Proceedings article (.pdf)]	13:00 *PV / Solar Manufacturing EHS* How to improve the LED ESH issues and GHG emission reduction in Taiwan J.Cheng, J.LU, Y.Peng [Proceedings article (.pdf)]	13:00 *Abatement Strategies* Lessons Learned From Measuring Destruction or Removal Efficiencies (DRE) of Fluorinated Greenhouse Gases Across Point-of-Use Abatement Devices B.Benaway, S.Hall* [Proceedings article (.pdf)]
13:45 *Emerging Codes* Complying with 1-Hour NO2 NAAQS B.Davis [Proceedings article (.pdf)]	13:45 *Waste Minimization* Improving the End-of-Life for Electronic Materials via Sustainable Recycling M.Korzenski, P.Jiang [Proceedings article (.pdf)]	13:45 *PV / Solar Manufacturing EHS* Sustainable Energy Solutions Through Product Life Cycle Management P.Sinha [Proceedings article (.pdf)]	13:45 *Abatement Strategies* DRE Measurement of POU Scrubber through Applying the Dilution Factor of PFCs C.Oh, S.Ko, Y.Jeong [Proceedings article (.pdf)]
14:30 *Emerging Codes* Implementing ISO 13849-1; An Equipment Manufacture\\\'s Perspective M.Fessler [Proceedings article (.pdf)]	14:30 *Waste Minimization* Creating the Green Fab standard labeling for Taiwan Semiconductor Industries J.LU, J.Cheng, F.Shu [Proceedings article (.pdf)]	14:30 *PV / Solar Manufacturing EHS* GHG Reporting for the Electronics Industry - Determination of Reporting Applicability D.Cotter, PE [Proceedings article (.pdf)]	14:30 *Abatement Strategies* Comparison Study of Fourier Transform Infrared (FTIR) and Quadrupole Mass Spectroscopy (QMS) for Point-of-Use (POU) Abatement System Effluent Flow Determination S.Hall, B.Benaway* [Proceedings article (.pdf)]
15:15 Break - Exhibit Hall - Vendor exhibiting and networking time
15:45 *Emerging Codes* Fire Safety Compliance - Why Are My Fire Safety Systems Not SEMI S2 Compliant? M.Wyman [Proceedings article (.pdf)]	15:45 *Waste Minimization* Research of reduction carbon dioxide emission by applying microalgae biotech in semiconductor factory C.Ching-Lung [Proceedings article (.pdf)]	15:45 *Disaster Preparedness Roundtable* Losses in the Semiconductor Industry – Case Studies and Lessons Learned W.Acorn
16:30 *Emerging Codes* Around the world chemical tour D.Graunke, M.Majors [Proceedings article (.pdf)]	16:30 *Waste Minimization* Environmentally-Benign In-Line Cleaning Solutions for Advanced Semiconductor Manufacturing T.Chen, T.Hogan, M.Korzenski [Proceedings article (.pdf)]

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May 19 (Thursday)

08:30 Keynote Presentation Dr. Kevin Dooley - ASU Towards harmonization of measuring and reporting product sustainability [Proceedings article (.pdf)]
09:30 Break - Exhibit Hall - Networking time
10:00 *CSR* Leveraging existing SEMI guidelines to drive leading-edge supplier environmental, health, safety and sustainability programs A.McIntyre, D.Firu [Proceedings article (.pdf)]	10:00 *Risk Management* Safety of personnel working near track for \\\"Overhead transportion vehicle\\\" S.Ibuka [Proceedings article (.pdf)]	10:00 *Safety/IH* Mitigation of Hazards Associated with Disilane in Semiconductor Manufacturing D.Westmoreland [Proceedings article (.pdf)]
10:45 *CSR* Building Information Modeling: A Process to Mitigate Risk, Improve Project Delivery, and integrate Sustainability into Semiconductor Facilities A.Chasey [Proceedings article (.pdf)]	10:45 *Risk Management* Integrated e-ESH System F.Hsu [Proceedings article (.pdf)]	10:45 *Safety/IH* Electronic Industry Code of Conduct S.Viera [Proceedings article (.pdf)]
11:30 Lunch Break - Presentation on current abatement technologies
13:00 *Energy Conservation* Practical Application of SEMI S23 C.Evanston [Proceedings article (.pdf)]	13:00 *Risk Management* Safety Analytics: The Future of Workforce Safety and Health T.Hohn, D.Duden	13:00 *GHG* PCS PIRANHA plasma abatement system: Update of evaluation on 300mm Etch process E.Kopatzki, J.Guerin [Proceedings article (.pdf)]
13:45 *Energy Conservation* Energy savings by air coil efficiency improvement S.Deschenes, R.Bernard, L.Galbreath [Proceedings article (.pdf)]	13:45 *Risk Management* Surface Contamination of Dummy Wafer and its Health Effect in Semiconductor Manufacturing Industry K.Choi [Proceedings article (.pdf)]	13:45 *GHG* Guideline for GHG Emission Measurement and Management M.Kagino [Proceedings article (.pdf)]
14:30 *Energy Conservation* Save Energy and Reduction of Greenhouse Gas by Energy Recovery System J.Park, M.Lee, Y.Jeong [Proceedings article (.pdf)]	14:30 *Risk Management* Prevention Maintenance Protection and Hazards Exposure Control of Thermal Type Local Scrubber MAT H.Tsou [Proceedings article (.pdf)]	14:30 *GHG* Global warming evaluation of Chamber cleaning gases by new indicators, CEWN and CETN A.Sekiya, S.Okamoto [Proceedings article (.pdf)]
15:15 Break - Networking time
15:45 Closing Ceremony SESHA/IHTESH [Proceedings article (.pdf)]
17:00 END

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May 20 (Friday): Professional Development Courses (PDC)

Morning - 8:00 am - 12 Noon

PDC #5: Fundamentals and EHS Challenges of PV Manufacturing (A. McIntyre)
- Full Day -

PCD #6: Exhaust Gas Management and Environmental CharacterizationVacuum and cryogen safety concerns. (M. Sherer)
- Full Day -

Lunch Break

Afternoon - 1:00 pm - 5:00 pm

PDC #5: Continues from morning

PCD #6: Continues from morning

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