SESHA 2011 Symposium / SIA IHTESH 2011 --- PDC6

Exhaust Management, Point-of-use Abatement Devices, Electronics Industry Greenhouse Gas Reporting Rule, and Process Emissions and POU Abatement Device DRE/Emissions Testing Methodologies

Mike Sherer

Semiconductor process and fab exhaust management procedures and strategies will be presented. Many of these also apply to LCD, solar and related industries. Discussion of fluorine, particulate, ammonia and ozone will be highlighted. Point-of-use (POU) abatement technologies overview will be provided. Important items to assist personnel in reducing maintenance and increasing uptime will detailed. The EPA Greenhouse Reporting Rule for electronics industry will be presented and any lessons learned provided. The EPA Testing Protocol for POU abatement device Destruction and Removal Efficiency (DRE) and the 2009 ISMI Testing Guideline will be presented. This overview will allow the attendee to understand how testing is conducted and how to work with testing suppliers.