SESHA 2012 Symposium Abstract

Hazardous Materials Closure Process & Success Intel D2 Wafer processing Facility

Addonizio, Dawn; Frenchen, Monica; Falcone, Basil
(Intel, Santa Clara)

Intel Corporation prepared a Hazardous Materials Facility Closure Plan (HMFCP) for the D2 Fabrication Facility located in Santa Clara, California. The D2 Facility is comprised of four semiconductor manufacturing modules constructed in separate phases and major manufacturing operations were completed in 2009. The purpose of the HMFCP was to identify environmental conditions at the Site, using guidance provided in the American Society for Testing and Materials (“ASTM”) Standard E 1527 05, Standard Practice for Environmental Site Assessments: Phase I Environmental Site Assessment and the Approved Hazardous Materials Closure Plan Date December 9, 2009 and in accordance with Title 22 of the California Code of Regulation 66270.11d. The scope of work for this HMFCP included conducting a Site visit and area reconnaissance; obtaining and reviewing an environmental regulatory agency database reports; maps; collecting environmental and occupational samples; evaluating the data; and preparing a final Closure Report. The scope of services also includes reviewing the Facility Closure and provides third party documentation to the City of Santa Clara Fire Department to grant Facility Closure for the hazardous materials business permit issued to Intel Corporation. The presentation will provide details of the preparation of the facility for closure including the regulatory process, tool and facilities hibernation and removal, and the intelligent deconstruction of facility systems. The project implemented a Zero Landfill Plan to recycle materials from the facility to reduce the environmental impact of deconstruction. The project implemented a robust safety plan to execute the project with the importance of worker safety at the core of the project. The presentation will also include a review of lessons learned from execution of this complex remediation project. Presenters: Dawn Addonizio, Intel Senior Environmental Engineer Ms. Addonizio will present the details of the preparation of the facility for closure including the regulatory process, tool, and facilities hibernation. Monica Frechen, Intel Construction EHS Engineer Ms. Frechen will present the details of the implementation of a robust safety plan to execute the project with the importance of worker safety at the core of the project. Basil Falcone, EnviroNova, EHS Professional Mr. Falcone will present activities of the removal and intelligent deconstruction of facility systems, implementation of a Zero Landfill Plan, the Regulatory closure process, and lessons learned.