SESHA 2014 Symposium Abstract

Nanoparticle EHS research

Speed, David
(IBM, New York)

The presentation will describe some of the key environmental, health, and safety challenges presented by current and future use of nanoparticles by the semiconductor industry. The presentation will provide an overview of semiconductor industry sponsored research on nanoparticle environmental, health, and safety; how that research intersects with key industry information needs, and with the general state of science on nano EHS