SESHA 2014 Symposium --- PDC4

ESH for III-V Processing



III-V, including but not limited to InGaAs, InP, InAs, InAlAs, GaSb, GaN, and BeO manufacturing utilizes a variety of III-V materials in the processes, many of which have potential and unique ESH hazards. Investigation and technical project work has been performed to understand the hazards posed by process materials, byproducts, effluents and emissions from these processes. In this PDC, experts in the areas of safety, health, industrial hygiene and environmental engineering will provide an update on III-V processing hazards, including solution which have been determined, or are under development, to mitigate risk to personnel and the environment. Specific topic areas will include medical monitoring , personnel/workspace sampling, processing and tool related hazards, effluent generation and treatment strategies.