Recent developments in wastewater treatment in the microelectronics industry
Phillis, Kody; Jenkins, Brian; Carroll, Barry
(Nalco, an Ecolab Company)
As the microelectronics industry continues to drive cost optimization in its operations, there will be new opportunities to develop and implement innovative environmental solutions. Three of the more commonly encountered wastewater challenges are copper removal, hydrogen peroxide removal, and fluoride removal. The presentation will provide insight regarding these challenges as well as discuss treatment options including their benefits and drawbacks. Based on actual fab operating data, we will also provide examples of the application of solutions for these challenges, including economic and environmental benefit summaries.