SESHA 2018 Symposium Abstract

Preparing for a SEMI S8 Evaluation

Ron Macklin
(Bureau Veritas North America, Renton, WA)

SEMI S8 recently changed adding a Related Information that provides guidance on how to plan for a third-party evaluation to SEMI S8. When preparing for an evaluation to SEMI S8, itís helpful to identify and group operational, service, and maintenance tasks associated with a given piece of equipment in order to go through the operational lifecycle of the equipment and to capture what will be needed to adequately complete an evaluation. This discussion will walk through the flowchart within the Related Information and provide an understanding and purpose behind the flowchart. This discussion will also provide an opportunity for a dialogue on the topic and scope of preparing for a SEMI S8 evaluation.