SESHA 2001 Symposium - Abstract View

Unique EHS Challenges in the Compound Semiconductor Environment

Romanow, Kerrie (EORM, Sunnyvale, CA)

Compound semiconductor operations offer hazards not commonly found in silicon processing fabrication facilities. The EHS professional faces different regulatory requirements and challenges. This presentation will provide an overview of the different technologies and chemicals utilized in compound semiconductor environments. The focus is to provide insight into the diverse EHS considerations confronting EHS professionals in this industry. The goal is to provide a framework to set the stage for the balance of the Compound Semiconductor section of the Environmental track.

The author will provide real life examples from her tenure as the EHS and Facilities Manager at a Compound Semiconductor fab in Santa Clara, CA

[abstract as .pdf]