SESHA 2001 Symposium - Abstract View

Unique Industrial Hygiene Concerns in Gallium-Arsenide Device Manufacturing Facilities

Jones, Anthony (Motorola, Tempe, AZ)

While there are many common manufacturing processes and equipment found throughout the semiconductor industry, gallium-arsenide device manufacturing introduces a variety of unique industrial hygiene concerns which may not be present or of significant concern in silicon-based manufacturing operations. This paper will describe and evaluate several examples illustrating this notion and provide a working platform for effective industrial hygiene management in a gallium-arsenide device manufacturing facility.

[abstract as .pdf]